WHAT WE DO
MEMS Manufacturing
MEMS (Microelectromechanical Systems) technology is an interdisciplinary field that combines electrical, mechanical, and materials engineering to create small-scale devices and systems. These devices are typically on the scale of micrometers and can range from sensors and actuators to complete microsystems. The fabrication process for MEMS involves a combination of microfabrication and semiconductor processing techniques, such as photolithography, etching, and deposition.
As MEMS technology continues to evolve, it has the potential to revolutionize many industries and create new opportunities for innovation and growth.
Our company has established a 200+ square meter Class 1000 cleanroom as a MEMS research and development and small batch production workshop. We are equipped with the latest state-of-the-art equipment, including SUSS photolithography machines, magnetron sputtering systems, etchers, spin coaters, programmable heat plates and other ion processing machines.
We also have imported microscopes, step profilers, and other testing equipment. We provide a complete solution from chip design to process fabrication and have the capability for mass production while ensuring timely delivery and quality assurance. This enables us to offer a comprehensive solution, from chip design to final product, and to ensure high quality and reliable MEMS devices for our customers.
That’s what our customers trust in.
Here is a brief introduction to the SU-8 mold fabrication process:
Substrate
Preparation
Spin-Coating
Prebake
Mask Alignment
Exposure
Development
Step
1
Etching
Post-bake
Step
3
Step
2
Step
4
Step
5
Step
6
Step
7
Step
8