MEMS Manufacturing
MEMS Capacities
In-house cleanroom MEMS production for 4/6-inch wafers
High-performance MEMS for microfluidics and life science
SU8 Lithography
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Multi-layer lithography
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2 µm feature size
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aspect ratios up to 20
Microfluidics Interfaces
MEMS Testing
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Complex channel design
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Advanced dicing and edge control
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Custom test protocols
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Automated ATE available
Advanced Etching
High-aspect-ratio
etching for silicon, glass,
Titanium and Tungsten
VIA Technology
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2D interposers
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TSV (Through Silicon Via)
Plastic Integration
Full support for packaging, bonding, and hybrid workflows
Show Cases
Spatial Transcriptomics Sequencing Chip
This high-precision chip is designed for spatial transcriptomics sequencing applications. It is fabricated entirely from optical-grade glass, providing exceptional transparency and compatibility with high-resolution imaging. The surface of the chip features a micro-pit array, where each pit has a diameter of 2.3 μm and a depth of 1.5 μm, precisely defined to capture spatial transcriptomic signals at the single-cell level.
Using advanced MEMS microfabrication technology, the array structure is patterned and etched with sub-micron accuracy, ensuring uniformity and repeatability across the entire chip surface. The result is a robust and reproducible platform optimized for high-throughput spatial omics research, enabling scientists to decode gene expression landscapes with spatial context.
Silicon Hydrophilic–Hydrophobic Array Chip
This is a silicon-based hydrophilic–hydrophobic array chip designed for mass spectrometry quality control. The blue regions correspond to hydrophilic spots with a contact angle of approximately 50°, while the white regions are hydrophobic coatings with a contact angle of approximately 115°. The chip can be transported and stored at ambient temperature, and the hydrophilic–hydrophobic coatings remain stable without peeling off.
Molds fabricated using MEMS technology
Precision metal molds are fabricated using MEMS processing technology. They are designed for thermoplastic injection molding. The minimum feature size is 2 µm.
SU-8 molds are fabricated using MEMS photolithography. They are mainly used for PDMS microfluidic chip production. Both single-layer and multi-layer molds can be made. The photolithography capabilities are shown below.
Photolithography Capabilities
